BLO
Batch Type Lift-Off Equipment
The fastest and most versatile batch system in the history of the lift-off process
Stable stripping performance is maintained by adopting a unique stripping system while increasing productivity by processing 25 wafers simultaneously. A wide variety of optional functions completely address all concerns such as residual peeling and reattachment of sludge.
Features
| Lift-Off Stripping Power | Rapid stripping achieved by use of powers by downflow in addition to swelling, oscillation and ultrasonic |
|---|---|
| Prevention of Reattachment | Thorough removal of sludge and polymers with downflow and side jets |
| Ultrasonic Irradiation System | Improvement in batch-to-batch ununiformity, by the multi-axis drivable ultrasonic system originally developed |
Supported processes
Lift-Off / Resist Stripping / Polymer Removal