MLO
MLO
Next generation hybrid type Lift-Off Equipment combining batch and single-wafer type
The accuracy of process time management is greatly improved while utilizing the advantages of both the batch type and the single-wafer type.
Reduction in transfer errors is achieved by the horizontal multi-joint robot and the unique equipment configuration.
Features
| High Processing Capacity | 1.3 times higher throughput than conventional systems |
|---|---|
| Higher Quality by Stabilizing the Dipping Time | Reduction in quality variations by our unique dipping time management method |
| Low Consumption Flash Processing | Reduction in the amount of chemicals by efficient injection system |
| Chemical Recovery Rate of 90% or Higher | Environmentally Friendly Structure |
| Separate Room Design | Prevention of contamination-related problems between chambers |
Supported processes
Lift-Off / Resist Stripping / Polymer Removal